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The planar lutetium sputtering target refers to the lithium target in the form of a flat plate. It generally refers to large-sized planar lithium target.
Planar Lutetium Sputtering Target Application
Planar lutetium sputtering target can be used in many applications. The details are as follows: - Electronics; - Semiconductor; - Chemical vapor deposition (CVD); - Physical vapor deposition (PVD) .