Zirconium Diboride Sputtering Target

Zirconium Diboride Sputtering Target List

Product Name	Shape	Purity	Size (inch)	Thickness (mm)
Zirconium Diboride Sputtering Target	Circular	99.5% - 99.9%	0 - 48	≥ 1
Zirconium Diboride Sputtering Target	Rectangular	99.5% - 99.9%	0 - 48	≥ 1
Zirconium Diboride Sputtering Target	Annular	99.5% - 99.9%	0 - 48	≥ 1
Zirconium Diboride Sputtering Target	Oval	99.5% - 99.9%	0 - 48	≥ 1
Zirconium Diboride Sputtering Target	Cylindrical	99.5% - 99.9%	0 - 48	≥ 1
Zirconium Diboride Sputtering Target	Planar	99.5% - 99.9%	0 - 48	≥ 1
Zirconium Diboride Sputtering Target	Rotatable (rotary)	99.5% - 99.9%	0 - 48	≥ 1

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Zirconium boride is a kind of boride with gray hard crystal appearance. There are three types of zirconium boride, namely zirconium monoboride, zirconium diboride and zirconium triboride. Only zirconium diboride is stable in a wide temperature range. Zirconium diboride is mainly used in industrial production. Zirconium diboride is hexagonal crystal with gray crystal or powder appearance, relative density of 5.8 and melting point of 3246 ℃. Zirconium diboride is resistant to high temperature and has high strength at room temperature and high temperature.

Zirconium diboride sputtering target is a kind of high purity zirconium diboride raw material by sputtering deposition. According to the different shapes, zirconium diboride sputtering targets can be divided into circular, rectangular, square, annular, oval, cylindrical, planar, rotatable (rotary) zirconium diboride targets. Zirconium diboride has good thermal shock resistance, low resistance and oxidation resistance at high temperature. It can be used as aerospace high temperature resistant material, wear-resistant and smooth solid material, cutting tool, thermocouple protection tube and electrode material of electrolytic melting compound. It is especially suitable for the surface of rolling bearing balls.

Zirconium Diboride Sputtering Target Application

Zirconium diboride sputtering target can be used in many applications. The details are as follows:
- Semiconductor;
- Chemical vapor deposition (CVD) display;
- Physical vapor deposition (PVD) display;
- Optical applications.