Zirconium Oxide (Zirconia) Sputtering Target

Zirconium Oxide Sputtering Target List

Product Name	Shape	Purity	Size (inch)	Thickness (mm)
Zirconium Oxide Sputtering Target	Circular	99.95% - 99.99%	0 - 48	≥ 1
Zirconium Oxide Sputtering Target	Rectangular	99.95% - 99.99%	0 - 48	≥ 1
Zirconium Oxide Sputtering Target	Annular	99.95% - 99.99%	0 - 48	≥ 1
Zirconium Oxide Sputtering Target	Oval	99.95% - 99.99%	0 - 48	≥ 1
Zirconium Oxide Sputtering Target	Cylindrical	99.95% - 99.99%	0 - 48	≥ 1
Zirconium Oxide Sputtering Target	Planar	99.95% - 99.99%	0 - 48	≥ 1
Zirconium Oxide Sputtering Target	Rotatable (rotary)	99.95% - 99.99%	0 - 48	≥ 1

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Zirconium oxide is a kind of white, odorless and tasteless oxide under normal conditions. The chemical formula is ZrO2 and its relative density is 5.85. The melting point is 2680 ℃. The boiling point is 4300 ℃. The hardness of zirconia is inferior to that of diamond, and it is difficult to dissolve in water, hydrochloric acid and dilute sulfuric acid.

Zirconium oxide sputtering target is a kind of high purity zirconium oxide raw material by sputtering deposition. According to the different shapes, zirconium oxide sputtering targets can be divided into circular, rectangular, square, annular, oval, cylindrical, planar, rotatable (rotary) zirconium oxide targets. It has the properties of high melting point, high resistivity, high refractive index and low coefficient of thermal expansion. It is an important high temperature resistant material, ceramic insulation material and ceramic shading agent, and is also the main raw material of artificial drilling.

Zirconium Oxide Sputtering Target Application

Zirconium oxide sputtering target can be applied in many occations, the details are as follows:
- Piezoelectric ceramic products;
- Domestic ceramics;
- Nonferrous Metals;
- Optical glass;
- Ceramic pigments;
- Electrostatic coating;
- Baking paint;
- Semiconductor;
- Chemical vapor deposition (CVD) display;
- Physical vapor deposition (PVD) display;
- Optical applications.