Hafnium Oxide Sputtering Target

Hafnium Oxide Sputtering Target List

Product Name	Shape	Purity	Size (inch)	Thickness (mm)
Hafnium Oxide Sputtering Target	Circular	99.95% - 99.99%	0 - 48	≥ 1
Hafnium Oxide Sputtering Target	Rectangular	99.95% - 99.99%	0 - 48	≥ 1
Hafnium Oxide Sputtering Target	Annular	99.95% - 99.99%	0 - 48	≥ 1
Hafnium Oxide Sputtering Target	Oval	99.95% - 99.99%	0 - 48	≥ 1
Hafnium Oxide Sputtering Target	Cylindrical	99.95% - 99.99%	0 - 48	≥ 1
Hafnium Oxide Sputtering Target	Planar	99.95% - 99.99%	0 - 48	≥ 1
Hafnium Oxide Sputtering Target	Rotatable (rotary)	99.95% - 99.99%	0 - 48	≥ 1

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Hafnium dioxide is a white solid hafnium oxide. The density of hafnium dioxide is 9.68g/cm3. The melting point is 2780-2920k. The boiling point is 5400 K. The coefficient of thermal expansion is 5.8 × 10-6 / ℃. It is insoluble in water, hydrochloric acid and nitric acid, but soluble in concentrated sulfuric acid and hydrofluoric acid. Hafnium dioxide is a raw material for the production of hafnium and hafnium alloy. It can be used as refractory, anti radioactive coating and catalyst.

Hafnium oxide sputtering target is a kind of high purity hafnium oxide raw material by sputtering deposition. According to the different shapes, hafnium oxide sputtering targets can be divided into circular, rectangular, square, annular, oval, cylindrical, planar, rotatable (rotary) hafnium oxide targets. It has the characteristics of wide band gap and high dielectric constant, which can be used in microelectronics. It is the most likely to replace the silicon-based integrated circuit's core device, the gate insulating layer of metal oxide semiconductor field-effect transistor (MOSFET), so as to solve the size limit problem of the development of traditional SiO2 / Si structure in MOSFET.

Hafnium Oxide Sputtering Target Application

Hafnium oxide sputtering target has the characteristics of wide band gap and high dielectric constant, it can be used in microelectronics. The details are as follows:
- Semiconductor;
- Chemical vapor deposition (CVD) display;
- Physical vapor deposition (PVD) display;
- Optical applications.