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Planar cerium oxide sputtering target refers to the cerium oxide target in the form of a flat plate. It generally refers to large-sized cerium oxide target.
Planar Cerium Oxide Sputtering Target Application
Planar cerium oxide sputtering target can be used in many applications. The details are as follows: - Ferroelectric; - Gate Dielectric; - For CMOS; - Non-volatile Memory; - Thin film capacitor; - Semiconductor; - Chemical vapor deposition (CVD) display; - Physical vapor deposition (PVD) display; - Optical applications.