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Planar silicon monoxide sputtering target refers to a flat silicon oxide target. Generally, it refers to large size planar silicon monoxide target.
Planar silicon monoxide sputtering targets can be used as fine ceramic synthetic material, and used as the preparation of optical glass and semiconductor materials; silicon monoxide can also evaporate in vacuum and be coated on the metal reflection mirror used for optical instruments as protective film; silicon monoxide can also be used for the preparation of semiconductor materials.
