Planar Silicon Nitride Sputtering Target

Planar Silicon Nitride Sputtering Target List

Product Name	Shape	Purity	Size (inch)	Thickness (mm)
Planar Silicon Nitride Sputtering Target	Circular	99.9% - 99.99%	0 - 48	≥ 1
Planar Silicon Nitride Sputtering Target	Rectangular	99.9% - 99.99%	0 - 48	≥ 1
Planar Silicon Nitride Sputtering Target	Annular	99.9% - 99.99%	0 - 48	≥ 1
Planar Silicon Nitride Sputtering Target	Oval	99.9% - 99.99%	0 - 48	≥ 1
Planar Silicon Nitride Sputtering Target	Cylindrical	99.9% - 99.99%	0 - 48	≥ 1
Planar Silicon Nitride Sputtering Target	Planar	99.9% - 99.99%	0 - 48	≥ 1
Planar Silicon Nitride Sputtering Target	Rotatable (rotary)	99.9% - 99.99%	0 - 48	≥ 1

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The planar silicon nitride sputtering target refers to the silicon nitride target in the form of a flat plate. It generally refers to large size silicon nitride target.

Planar Silicon Nitride Sputtering Target Application

Planar silicon nitride sputtering target can be used in many applications. The details are as follows:
- Semiconductor;
- Chemical vapor deposition (CVD) display;
- Physical vapor deposition (PVD) display;
- Optical applications.