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Planar tantalum oxide sputtering target refers to tantalum oxide target in flat shape. It generally refers to large-sized tantalum oxide target.
Planar tantalum oxide sputtering target can be used in many applications. The details are as follows: - Ferroelectric; - Gate Dielectric; - For CMOS; - Semiconductor; - Chemical vapor deposition (CVD) display; - Physical vapor deposition (PVD) display; - Optical applications.
