Annular Aluminum Sputtering Target List
| Product Name |
Purity |
Size (inch) |
Thickness (mm) |
| Annular Aluminum Sputtering Target |
99.99% - 99.9995% |
0 - 48 |
≥ 1 |
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Annular Aluminum Sputtering Targets are a special form of target used in physical vapor deposition (PVD) sputtering processes, designed for coating on specific geometric structures. The core feature of these targets is their annular (ring-shaped) structure, typically hollow with a relatively thick wall.
These targets are not commonly used in mainstream large-scale industrial coating processes (such as flat panel displays), but are key tools for precision coating and specific research fields. Their design was originally intended to meet the need for uniform coatings on complex curved surfaces, inner surfaces, or specialized configurations.
Operating Principle:
Annular targets are typically fixed as the cathode inside a vacuum chamber. Plasma is excited on their inner ring, outer ring, or end faces (depending on the magnetic field design), creating an etching zone. Aluminum atoms sputtered from the target surface can deposit on the center of the ring or in specific directions outside.
Core Value and Unique Positioning:Special Geometric Compatibility: These targets are specifically designed for uniform coating on the inner surfaces of tubular, rod-like, columnar objects, or those with cavities—applications where planar or rotary tube targets cannot achieve uniformity.
Flexible Spatial Configuration: The annular structure itself can serve as a functional part of the vacuum chamber (such as part of the chamber wall) or be used to create a specific plasma environment.
Suitable for Small-Batch, High-Precision Coatings: Commonly used in research and development, customized optical devices, precision sensors, and aerospace components.
Annular Aluminum Sputtering Target Application
The applications of
annular aluminum sputtering targets are highly specialized, focusing primarily on the following areas:
1. Optical and Optoelectronic Fields:Fiber Optic Coating: Used for preparing aluminum reflective coatings on fiber Bragg gratings or the end faces of optical fibers. A miniaturized annular target (or tube target) allows the fiber to pass axially through the center, ensuring uniform coating around the circumference.
Special Optical Components: Used to prepare high-reflectivity aluminum films on spherical, elliptical, or complex curved optical elements (such as laser cavity mirrors or infrared optical components). By placing the workpiece in a specific position within the annular target, the symmetrical spatial design improves the film thickness distribution.
Filters and Detector Windows: For depositing metal reflective layers on custom narrow-band filters or detector windows.
2. Research and Experimental Devices:Materials Research: In materials science laboratories, annular targets are used to uniformly deposit aluminum electrodes or coating layers on substrates with special morphologies, such as nanowires, carbon nanotube arrays, or microspheres.
Plasma Diagnostics and Modification: The annular target itself can be part of an RF or DC plasma source used for surface modification or to generate specific plasma environments.
3. Precision Instruments and Sensors:MEMS/NEMS Devices: Used to deposit conductive aluminum layers in deep grooves, vertical sidewalls, or micro-tube structures during the fabrication of microelectromechanical (MEMS) or nanoelectromechanical (NEMS) systems.
Ion Gauge Tubes: Aluminum films are deposited inside some vacuum gauge tubes (sensors used to measure vacuum levels) to stabilize their electron emission characteristics.
Columnar or Tubular Electrode Preparation: Used to prepare functional aluminum electrodes for specific physical or chemical sensors.
4. Aerospace and Military (Specific Components):Waveguide Inner Coating: Aluminum films are deposited on the inner surfaces of radar waveguide devices to reduce signal transmission loss.
Engine Components: Functional coatings are applied to the inner walls of certain tubular aerospace components for thermal control or electromagnetic shielding.
5. Decorative and Functional Coatings (Special-Shaped Workpieces):Decorative and Functional Coatings: Used for depositing decorative or functional aluminum films on irregular or internal surfaces of jewelry, watch components, and medical instruments (such as endoscope parts).
